使用磁控溅射法制备了不同调制波长的Ni/Al多层膜，利用X射线衍射（XRD）和高分辨显微技术（HRTEM）对薄膜进行了微结构表征，采用连续刚度法（CSM）研究了不同压入深度下多层膜的硬度。结果表明，随调制波长减小，薄膜呈纳米晶结构特征且存在超硬效应。调制波长L大于30 nm时，纳米压入硬度随压入深度的增加而升高；L小于30 nm时最大压入深度的硬度测量值反而最小。同时发现压入深度较小时硬度相对大小对调制波长不敏感。结合微结构表征，从晶界和膜界的竞比变形角度进行了分析讨论。
Ni/Al nanomutlialyers with different modulated periods were prepared using multi-target magnetron sputtering method. The microstructure of nanomultialyers was studied by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). The continuous stiffness mode (CSM) was employed to measure the effect of loading depth on the determination of hardness of thin films by means of nanoindentation. The results reveal that crystalline was strengthened with the increasing modulated period, L. And the superhardness phenomenon was observed for Ni/Al multilayers. Interestingly, for the multilayer with L more than 30 nm, depth-dependent hardness increased with the enhanced loading depth. However, the highest-depth hardness shows the lowest value for the Ni/Al multilayer with modulated period less than 30 nm. This tendency indicates the depth-sensing hardness for nanomultilayer by nanoindentation and this result is attributed to the competitive effects of modulated period and grain boundary.
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