采用直流磁控溅射法制备氧化钒薄膜,并采用不同的温度对其进行氧化法热处理,通过XRD、SEM、四探针薄膜电阻测试,分析了不同热处理温度对氧化钒薄膜的晶相特性与热敏特性的影响.实验分析证明热处理温度升高后(400℃)得到的薄膜热敏特性良好,其室温电阻为160KΩ·cm,室温电阻温度变化系数为-2.4％/℃,变温过程中(20～98℃)其平均值约-1.98％/℃,表明温度升高有利于改善薄膜热敏特性,在非制冷红外探测器应用方面具有发展潜力.
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