用sol-gel工艺制备Ba1-x Srx TiO3系铁电薄膜(1-x=0.3,0.5~0.9).实验证实,在制备溶胶过程中,提高加热温度能有效增加BST薄膜的介电调谐百分率.室温下,100kHz,各组分薄膜的介电常数(ε)和介电调谐百分率(Tunability%)均呈现较高的值.其中,Ba0.8 Sr0.2 TiO3的介电常数和调谐百分率达到最大分别为:678和39%,比国际上同类文献报道的数据高.BST的ε-E曲线呈良好的单值函数关系.介电温谱出现明显宽化,调谐曲线峰值点对应的温度较居里温度低20~30℃,本文并对上述现象作出解释.
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