为了进一步研究钛材表面TiO2微弧氧化膜的生长过程和生长模式,采用物理分析技术分析了其微弧氧化过程中不同放电阶段膜表面的形貌、膜层厚度、相成分、表面粗糙度和硬度的变化.结果表明:TiO2多孔膜最初以孤立的岛状生长模式生长,随微弧氧化反应的进行,孤立的岛状氧化膜彼此相连接,膜表面形貌和厚度逐渐趋于一致,氧化膜的孔径、厚度、粗糙度和硬度均有增加;膜的相成分由亚稳的锐钛矿向高温下更加稳定的金红石转变,羟基磷灰石(HA)的量逐渐增加;TiO2膜所呈现的特性与微弧氧化过程中不同阶段的放电特性密切相关.
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