移动通信技术的迅猛发展扩大了高频声表面波(sAw)器件的应用范围,金刚石因具有最高的声表面波传播速度而使得压电薄膜/金刚石多层结构成为高频声表面波器件的首选材料.综述了ZnO/diamond、A1N/diamond和LiNbO3/diamond多层结构声表面波特性理论研究及实验研究进展,并展望了其今后的发展趋势.
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