不同衬底上VO2薄膜的微观结构和光学性能研究

稀有金属材料与工程, 2008, 37(5): 819-822.

不同衬底上VO2薄膜的微观结构和光学性能研究

颜家振 ^1, , 黄婉霞 ^2, , 张月 ^3, , 刘小杰 ^4, , 涂铭旌 ^5,

1.四川大学,四川,成都,610064

2.四川大学,四川,成都,610064

3.四川大学,四川,成都,610064

4.四川大学,四川,成都,610064

5.四川大学,四川,成都,610064

关键词：云母衬底 , VO2薄膜 , 热致相变 , 结晶取向

Microstructure and Optic Properties of VO2 Films Fabricated on Different Substrates

以云母(001)晶面和玻璃片为衬底,采用溶胶-凝胶法在其表面制VO2薄膜.利用XRD,AFM,FTIR等手段分析了不同衬底上薄膜的微观结构和光学性能.结果表明,云母表面VO22薄膜常温下呈单一的(011)取向,而玻璃表面VO2薄膜呈现(100)和(011)2种取向,单一(011)晶体取向的OV2薄膜表现出更好的光学开关性能.还分析了VO2薄膜的晶体取向对其光学性能的影响.

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不同衬底上VO2薄膜的微观结构和光学性能研究

Microstructure and Optic Properties of VO2 Films Fabricated on Different Substrates

参考文献