采用直流磁控溅射法在玻璃衬底上沉积铌掺杂氧化锌(NZO)透明导电薄膜.通过X射线衍射(XRD)、扫描电镜(SEM)以及透射光谱等测试研究了溅射功率对薄膜结构、形貌以及光电性能的影响.实验结果表明NZO薄膜是多晶膜,具有ZnO的六角纤锌矿结构,最佳取向为(002)方向.溅射功率从40W增加到80W时,薄膜的电阻率迅速下降；功率超过80W时,电阻率趋于平稳.在溅射功率为100W时,电阻率具有最小值5.89×10-4Ω·cm,光学带隙具有最大值3.395eV.实验制备的NZO薄膜附着性能良好,在可见光范围内的平均透过率均超过86.6％.
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