化学气相沉积是目前广泛用于制备碳材料如纳米金刚石、碳纳米管、碳纳米尖端等材料的技术.在制备这些碳材料时,氢气是一种主要的反应气体,它形成的原子氢或离子氢在材料生长过程中对所形成的碳材料具有刻蚀作用,以及与碳材料表面上或内部的氢作用发生脱氢反应.但在不同的条件下,氢表现出刻蚀作用或脱氢作用.总结了氢在不同条件下的作用,提出了一些生长高质量碳材料的方法.
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