以金属铟和结晶四氯化锡为原料,采用溶胶-凝胶工艺,用浸渍提拉法在石英玻璃基体上制备ITO透明导电薄膜.采用XRD,AFM,四探针电阻率仪,紫外分光光度计对薄膜的晶型结构,表面形貌,方电阻和透光率进行了测定和分析,研究了热处理温度和提拉层数对薄膜光电性能的影响.结果表明:随着热处理温度的升高,薄膜的方电阻显著降低,透光率也不断增大,但是当后处理温度大于750℃时,透光率略有降低,方电阻仍然降低.
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