等离子辅助化学气相沉积(PECVD)腔室的气流分布、温度分布是影响薄膜沉积工艺均匀性以及沉积速率的重要原因之一.本文对PECVD腔室气流建立连续流体和传热模型,研究了腔室内流场和温度分布特性;讨论了四种不同稳流室结构的PECVD腔室,在加热盘恒温400℃、质量流量5000 sccm、抽气口压力133 Pa的工艺条件下12英寸晶圆片附近上方流速、压力、温度分布情况;选择了其中一种稳流室结构作了多种质量流量( 20 ~ 5000 sccm)入口条件下的流场分析.仿真研究发现:在抽气口位置偏置的情况下,四种不同稳流室结构的腔室内热流场并未出现明显偏置,这表明抽气口偏置对工艺均匀性没有明显影响.加热盘附近上方2 mm处温度场大面均匀、稳定,且随入口质量流量变化波动很小,表现出良好的稳定性;气压分布呈现中心高边缘低的抛物线特征,流速呈现中心低边缘高的线性特征,且晶圆片附近以及喷淋头( Showerhead)入口压力和流速均随着入口质量流量的增加而升高.研究结果对PECVD腔室结构设计及工艺控制具有重要意义.
参考文献
[1] | Yabe H;Yuuki A;Matsui Y .Study of Surface Reaction Probability of CFx Radicals by Trench Deposition Method[J].Japanese Journal of Applied Physics,1991,30(11):2873-2877. |
[2] | Alayo M I;Pereyra I;Carreno M N P .Thick SiOx Ny and SiO2 Films Obtained by PECVD Technique at Low Temperatures[J].Thin Solid Films,1998,332:40-45. |
[3] | Komiyama H;Shimogaki Y;Egashira Y .Chemical Reaction Engineering in the Design of CVD Reactors[J].Chemical Engineering Science,1999,54:1941-1957. |
[4] | Sansonnens L.;Bondkowski J.;Mousel S.;Schmitt JPM.;Cassagne V. .Development of a numerical simulation tool to study uniformity of large area PECVD film processing[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):21-26. |
[5] | Kim YJ;Boo JH;Hong B;Kim YJ .Effects of showerhead shapes on the flowfields in a RF-PECVD reactor[J].Surface & Coatings Technology,2005(1/3):88-93. |
[6] | H Caquineau;I Enache;N Gherardi;N Naudé;F Massines .Influence of gas flow dynamics on discharge stability and on the uniformity of atmospheric pressure PECVD thin film[J].Journal of Physics, D. Applied Physics: A Europhysics Journal,2009(12):125201-7. |
[7] | 李志明,郝跃,张进成,许晟瑞,毕志伟,周小伟.氮化物MOCVD反应室流场的仿真与分析[J].人工晶体学报,2010(01):226-231. |
[8] | Geiser J;Arab M.Modeling and Simulation of a Chemical Vapor Deposition[J].Journal of Applied Mathematics,2011(2011):1155. |
[9] | Prada A;Civan F .Modification of Darcy's Law for the Threshold Pressure Gradient[J].Journal of Petroleum Science and Engineering,1999,22:237-240. |
[10] | Reza Masoodi;Krishna M. Pillai .Darcy's Law-Based Model for Wicking in Paper-Like Swelling Porous Media[J].AIChE Journal,2010(9):2257-2267. |
[11] | Versteeg H K;Malalasekera W.An Introduction to Computational Fluid Dynamics-The Finite Volume Method[M].Longman Scientific & Technical,1995 |
[12] | Patankar S V.Numerical Heat Transfer and Fluid Flow[M].Hemisphere Publishing Corporation,1980 |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%