新型PST铁电薄膜的制备及其电性能研究

材料导报, 2003, 17(z1): 218-221.

新型PST铁电薄膜的制备及其电性能研究

李元昕 ^1, , 刘梅冬 ^2, , 曾亦可 ^3, , 姜胜林 ^4, , 邓传益 ^5,

1.华中科技大学电子科学与技术系,武汉,430074

2.华中科技大学电子科学与技术系,武汉,430074

3.华中科技大学电子科学与技术系,武汉,430074

4.华中科技大学电子科学与技术系,武汉,430074

5.华中科技大学电子科学与技术系,武汉,430074

基金项目: 国家高技术研究发展计划(863计划)(2002AA325080) 国家自然科学基金(90201028)

关键词： PST薄膜 , 制备工艺 , 铁电性 , 热释电性 , 介电性

A Review of Preparation Methods and Electrical Properties of New PST Thin Films

PST铁电薄膜是一种具有优良铁电、热释电和介电等性能的铁电材料.该材料在红外探测器、红外焦平面阵列、热成像器件、非易失性铁电存储器和大容量电容器等方面具有广泛的应用.PST铁电薄膜的制备方法多种多样,各具优缺点,不同的制备工艺对薄膜的性能有影响.叙述了PST铁电薄膜的制备技术、电性能和在热释电红外探测器方面的应用.

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新型PST铁电薄膜的制备及其电性能研究

A Review of Preparation Methods and Electrical Properties of New PST Thin Films

参考文献