基于高温超导单晶材料BizSrzCaCu2O8＋x（BSCCO）的约瑟夫森（Josephson）本征结器件制备工艺，成功制备出形貌整齐、特性良好、一致性高的大尺寸太赫兹辐射源本征结器件．从工艺的各个步骤出发，总结了要点，并对原有工艺做出改进．通过扫描电子显微镜观察刻蚀形貌，总结了光刻最佳后烘温度条件，提出了一套重复性好、成功率高的工艺方法．
Succeeded in fabricating large size Terahertz emitter device with neat feature and high consistency, basing the high temperature superconducting single crystal material. Summarized the fabrication process, and made improvements. Used the scanning electron microscope to observe the sample feature after argon ion milling, and determined the optimum post-baking temperature condition of the photolithography process. Report a good repeatability and high success rate fabrication process.
参考文献
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