本文采用激光诱导高纯硅烷气相反应在不同的合成条件下制备出平均粒径为２０—１００ｎｍ。晶粒度为１８—３７ｎｍ的各种纳米Ｓｉ粉。研究了实验参数对粉体形成的影响并采用多种测试手段（ＴＥＭ．ＸＰＳ，ＸＲＤ，ＦＴＩＲ．ＢＥＴ）研究了粉体粒子形貌、键结构特征及表面状态。结果表明。粉体由团聚态形状不规各单分散球形的多晶粒子组成。较低的激光功率似加大稀释Ａｒ气量有利于单分散细粒子的形成。粉体氧杂质含量为２．０—３．０ｗｔ－％。主要以Ｏ－Ｓｉ－Ｈ键状态存在于粒子表面，是由粉体暴露空气后粒子表面产生化学吸附氧形成的。
Nano-crystalline Si powder with mean particle diameter of 20 -100 nm and grain diameter of 18-37 nm has been synthesized by laser-induced high purity silane gas reaction. The influences of processing parameters on the formation of the powders was studied and the powders produced were characterized by various techniques (TEM. XPS. XRD.FTIR and BET). Results show that the powder consists of monodispersed spherical particles and agglomerated irregular particles. The Si powder with monodispersed equiaxed particles with small size are favoured to form under lowering laser power and raising Ar dilute. There is 2.0- 3.0 wt-% of oxygen impurities in the Si powder mainly existing on particle surface in O-Si-H bond state. which came from the chemisorption of the powder to oxygen in air. Correspondent. LI Yali, Institute of Metal Research. Chinese Academy of Sciences Sheayang 110015)
参考文献
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| [5] | CannonWR,DanforthSC,HaggertyJS,MarraRA．JAmCeramSoc,1982 |
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