在常压下采用经济、适合规模化生产的化学溶液沉积法生长外延的La1-xSrxTiO3薄膜, 为YBa2Cu3O7-σ(YBCO)涂层导体提供导电缓冲层. 前驱溶液经旋转涂覆在单晶LaAlO3(001)基底上, 在纯氩气氛下分别于840, 890, 940和990 ℃恒温60 min制备薄膜. X射线衍射(XRD)分析, 在890～990 ℃的热处理条件下, 均得到纯净的具有良好外延性的La1-xSrxTiO3薄膜. 通过扫描电子显微镜(SEM)和扫描隧道显微镜(STM)观察, 样品表面光滑致密, 膜厚约为180 nm. 通过半定量能谱(EDS)分析, 确定薄膜成分为La0.4Sr0.6TiO3, 表明热处理过程中元素La部分挥发. 在890 ℃热处理温度下制得薄膜的电阻率约为1×10-2 Ω · cm.
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