研究了溶胶-凝胶法引入ZnO-B2O3-SiO2的ZnTiO3低温烧结陶瓷材料合成、结构、烧结及介电性能.结果发现:ZnO-B2O3-SiO2溶胶均匀包覆在ZnTiO3颗粒表面,形成球形包覆颗粒.用溶胶-凝胶法引入ZnO-B2O3-SiO2制备的样品容易致密烧结,晶粒大小均匀,气孔率比固相法引入ZnO-B2O3-SiO2玻璃制备的样品小.以溶胶-凝胶方式引入ZnO-B2O3-SiO2制备的ZnTiO3陶瓷εr偏差±0.3,Q×f偏差±1000 GHz,离散性小于以固相法引入ZnO-B2O3-SiO2玻璃制备的ZnTiO3陶瓷的性能(εr偏差±0.8,Q×f偏差±2 100GHz),可用于制造对εr偏差更小的小型多层微波频率器件.
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