采用电沉积-硫化法制备了CuInS2薄膜,考察了硫源温度对CuInS2薄膜微结构的影响,并分析了硫化过程中的反应动力学.采用扫描电子显微镜(SEM)和能潜仪(EDS)观察并分析了薄膜的表面形貌和组分,采用X射线衍射仪(XRD)表征了薄膜的组织结构.结果表明,硫化过程的生长动力学不同于硒化过程,CuInS2薄膜的生长遵循扩散机制,当硫源温度在300～340℃之间,均可制得单一黄铜矿相结构且沿(112)面择优取向生长的CuInS2薄膜,且硫源温度为340℃制备的CuInS2薄膜均匀、致密,晶粒尺寸约为1μm,适合于制备CIS薄膜太阳能电池吸收层.
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