较为详尽地论述了n型半导体材料In2O3的掺杂情况,并就不同金属氧化物掺杂引起的气敏性能作了简单的分析,发现不同的金属氧化物掺杂对NO2、O3及一些还原性气体的灵敏度有不同程度的提高,改善了In2O3的气敏性能,同时还探讨了In2O3对不同气体(H2、H2S、NO2、O3,Cl2、C2H5OH)的敏感机理.
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