基于黑硅材料的发展,讨论了国内外化学刻蚀制备黑硅的研究进展,包括掩膜辅助、金属离子辅助化学刻蚀.结果表明,黑硅材料的表面特殊结构能够有效降低硅表面的反射率,从而提高太阳能电池转换效率.此外,化学刻蚀法制备黑硅简便易行、成本低廉,高效可靠,具有良好的发展前景.
参考文献
| [1] | Liu Y;Liu S;Wang Y;Feng G;Zhu J;Zhao L .Broad band enhanced infrared light absorption of a femtosecond laser microstructured silicon[J].Laser Physics: An International Journal devoted to Theoretical and Experimental Laser Research and Application,2008(10):1148-1152. |
| [2] | Brian R. Tull;James E. Carey;Eric Mazur;Joel R McDonald;Steven M. Yalisove .Silicon Surface Morphologies after Femtosecond Laser Irradiation[J].MRS bulletin,2006(8):626-633. |
| [3] | Shuying Liu;Jingtao Zhu;Yang Liu;Li Zhao .Laser induced plasma in the formation of surface-microstructured silicon[J].Materials Letters,2008(23):3881-3883. |
| [4] | Her T H;Finlay R J;Wu C et al.Microstructuring of silicon with femtosecond laser pulses[J].Applied Physics Letters,1998,73(12):1673. |
| [5] | A.Y. Vorobyev;Chunlei Guo .Direct creation of black silicon using femtosecond laser pulses[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2011(16):7291-7294. |
| [6] | 吴文威,徐嘉明,陈宏彦."黑硅"表面特殊锥状尖峰结构的制备及其光学模型仿真[J].中国激光,2011(06):246-250. |
| [7] | Hao Mei;Chao Wang;Jimmy Yao;Yun-Ching Chang;Jiping Cheng;Yong Zhu;Shizhuo Yin;Claire Luo .Development of novel flexible black silicon[J].Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter,2011(4):1072-1075. |
| [8] | Barberoglou, M.;Zorba, V.;Pagozidis, A.;Fotakis, C.;Stratakis, E. .Electrowetting properties of micro/nanostructured black silicon[J].Langmuir: The ACS Journal of Surfaces and Colloids,2010(15):13007-13014. |
| [9] | Strehlke S.;Guillet J.;Levy-Clement C.;Bastide S. .Design of porous silicon antireflection coatings for silicon solar cells[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2000(0):81-86. |
| [10] | L. L. Ma;Y. C. Zhou;N. Jiang;X. Lu;J. Shao;W. Lu;J. Ge;X. M. Ding;X. Y. Hou .Wide-band "black silicon" based on porous silicon[J].Applied physics letters,2006(17):171907-1-171907-3-0. |
| [11] | 刘小兵,史向华,廖太长,任鹏,柳玥,柳毅,熊祖洪,丁训民,侯晓远.声空化物理化学综合法制备发光多孔硅薄膜的微结构与发光特性[J].物理学报,2005(01):416-421. |
| [12] | 刘光友,谭兴文,姚金才,王振,熊祖洪.电化学制备薄黑硅抗反射膜[J].物理学报,2008(01):514-518. |
| [13] | Jansen H.;Deboer M.;Elwenspoek M.;Fluitman J.;Gardeniers H. .A SURVEY ON THE REACTIVE ION ETCHING OF SILICON IN MICROTECHNOLOGY[J].Journal of Micromechanics and Microengineering,1996(1):14-28. |
| [14] | Yoo JS;Parm IO;Gangopadhyay U;Kim K;Dhungel SK;Mangalaraj D;Yi JS .Black silicon layer formation for application in solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2006(18/19):3085-3093. |
| [15] | Yoo J;Yu G;Yi J .Black surface structures for crystalline silicon solar cells[J].Materials Science and Engineering B,2009,159-160:333. |
| [16] | Howard M. Branz;Vernon E. Yost;Scott Ward;Kim M. Jones;Bobby To;Paul Stradins .Nanostructured black silicon and the optical reflectance of graded-density surfaces[J].Applied physics letters,2009(23):231121-1--231121-3-0. |
| [17] | Kumar, D.;Srivastava, S.K.;Singh, P.K.;Husain, M.;Kumar, V. .Fabrication of silicon nanowire arrays based solar cell with improved performance[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2011(1):215-218. |
| [18] | Srivastava, S.K.;Kumar, D.;Vandana;Sharma, M.;Kumar, R.;Singh, P.K..Silver catalyzed nano-texturing of silicon surfaces for solar cell applications[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2012:33-38. |
| [19] | Kuiqing Peng;Jing Zhu .Simultaneous gold deposition and formation of silicon nanowire arrays[J].Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry,2003(0):35-39. |
| [20] | Koynov S;Brandt M S;Stutzmarnn M .Black nonreflecting silicon surface for solar cells[J].Applied Physics Letters,2006,88(20):203107. |
| [21] | Kuiqing Peng;Aijiang Lu;Ruiqin Zhang;Shuit-Tong Lee .Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching[J].Advanced functional materials,2008(19):3026-3035. |
| [22] | Tseng S C;Chen H L;Yu C C et al.Using intruded gold nanoclusters as highly active catalysts to fabricate silicon nanostalactite structures exhibiting excellent light trapping and field emission properties[J].Energy Environ Sci,2011,4:5020. |
| [23] | Xia, Y.;Liu, B.;Zhong, S.;Li, C. .X-ray photoelectron spectroscopic studies of black silicon for solar cell[J].Journal of Electron Spectroscopy and Related Phenomena,2012(11/12):589-592. |
| [24] | Xu L;Li W;Xu J et al.Morphology control field emission properties of high-ordered Si nanoarrays fabricated by modified nanosphere lithography[J].Applied Surface Science,2009,255(10):5414. |
| [25] | Sakurai M;Shimojima A;Heishi M;Kuroda K .Preparation of mesostructured siloxane-organic hybrid films with ordered macropores by templated self-assembly[J].Langmuir: The ACS Journal of Surfaces and Colloids,2007(21):10788-10792. |
| [26] | X. H. Xia;J. P. Tu;J. Zhang .Cobalt Oxide Ordered Bowl-Like Array Films Prepared by Electrodeposition through Monolayer Polystyrene Sphere Template and Electrochromic Properties[J].ACS applied materials & interfaces,2010(1):186-192. |
| [27] | Deng Z;Chen M;Gu G et al.A facile method to fabricate ZnO hollow spheres and their photocatalytic property[J].Journal of Physical Chemistry B,2008,112(01):16. |
| [28] | Li Y;Huang K;Lai H et al.Photoluminescence of Si-based nanotips fabricated by anodic aluminium oxide template[J].Applied Surface Science,2011,257(24):10671. |
| [29] | Xueming Li;Dingsheng Wang;Libin Tang;Kun Dong;Yongjun Wu;Peizhi Yang;Pengxiang Zhang .Controllable synthesis of Ag nanorods using a porous anodic aluminum oxide template[J].Applied Surface Science,2009(17):7529-7531. |
| [30] | Li X;Dong K;Tang L et al.The fabrication of Ag nanoflakes arrays via self-assembly on the surface of an anodic aluminium oxide template[J].Applied Surface Science,2010,256(09):2856. |
| [31] | Benjamin S. Flavel;Martin J. Sweetman;Cameron J. Shearer .Micropatterned Arrays of Porous Silicon: Toward Sensory Biointerfaces[J].ACS applied materials & interfaces,2011(7):2463-2471. |
| [32] | Song, H.S.;Zhang, W.J.;Cheng, C.;Tang, Y.B.;Luo, L.B.;Chen, X.;Luan, C.Y.;Meng, X.M.;Zapien, J.A.;Wang, N.;Lee, C.S.;Bello, I.;Lee, S.T. .Controllable fabrication of three-dimensional radial ZnO Nanowire/silicon microrod hybrid architectures[J].Crystal growth & design,2011(1):147-153. |
| [33] | Tong, HD;Chen, S;van der Wiel, WG;Carlen, ET;van den Berg, A .Novel Top-Down Wafer-Scale Fabrication of Single Crystal Silicon Nanowires[J].Nano letters,2009(3):1015-1022. |
| [34] | Lee, M.;Jeon, Y.;Moon, T.;Kim, S. .Top-down fabrication of fully CMOS-compatible silicon nanowire arrays and their integration into CMOS inverters on plastic[J].ACS nano,2011(4):2629-2636. |
| [35] | Huang, ZP;Fang, H;Zhu, J .Fabrication of silicon nanowire arrays with controlled diameter, length, and density[J].Advanced Materials,2007(5):744-748. |
| [36] | Bechelany Mikhael;Berodier Elise;Maeder Xavier .New Silicon Architectures by Gold-Assisted Chemical Etching[J].ACS applied materials & interfaces,2011(10):3866-3873. |
| [37] | Jinquan Huang;Sing Yang Chiam;Hui Huang Tan .Fabrication of Silicon Nanowires with Precise Diameter Control Using Metal Nanodot Arrays as a Hard Mask Blocking Material in Chemical Etching[J].Chemistry of Materials: A Publication of the American Chemistry Society,2010(13):4111-4116. |
| [38] | Kuo C Y;Gau C .Vapor-solid-solid growth of crystalline silicon nanowires using anodic aluminium oxide template[J].Thin Solid Films,2011,519(11):3603. |
| [39] | Zhang Z;Shimizu T;Senz S et al.Ordered high-density Si[100]nanowire arrays epitaxially grown by bottom imprint method[J].Advanced Materials,2009,21(27):2824. |
| [40] | 姚素薇,陆平,张卫国.硅基AAO模板法制备纳米阵列研究进展[J].化工进展,2007(08):1088-1092. |
| [41] | Huang ZP;Zhang XX;Reiche M;Liu LF;Lee W;Shimizu T;Senz S;Gosele U .Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching[J].Nano letters,2008(9):3046-3051. |
| [42] | Zhipeng Huang;Nadine Geyer;Peter Werner;Johannes de Boor;Ulrich Goesele .Metal-Assisted Chemical Etching of Silicon: A Review[J].Advanced Materials,2011(2):285-308. |
| [43] | Fang H;Wu Y;Zhao JH;Zhu J .Silver catalysis in the fabrication of silicon nanowire arrays[J].Nanotechnology,2006(15):3768-3774. |
| [44] | Huang Z;Shimizu T;Senz S et al.Ordered arrays of vertically aligned[110]silicon nanowires by suppressing the crystallographically preferred 〈100〉 etching directions[J].Nano Letters,2009,9(07):2519. |
| [45] | Chang S W;Chuang V P;Boles S T et al.Densely packed arrays of ultra-high-aspect-ratio silicon nanowire fabricated using block-copolymer lithography and metal-assisted etching[J].Advanced Functional Materials,2009,19(15):2495. |
| [46] | Fatima Toor;Howard M. Branz;Matthew R. Page;Kim M. Jones;Hao-Chih Yuan .Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells[J].Applied physics letters,2011(10):103501-1-103501-3. |
| [47] | Shinji Yae;Yukinori Kawamoto;Hiroyuki Tanaka;Naoki Fukumuro;Hitoshi Matsuda .Formation of porous silicon by metal particle enhanced chemical etching in HF solution and its application for efficient solar cells[J].Electrochemistry communications,2003(8):632-636. |
| [48] | Koynov S;Brandt MS;Stutzmann M .Black multi-crystalline silicon solar cells[J].physica status solidi(RRL): rapid research letterse,2007(2):R53-R55. |
| [49] | Nishioka K;Horita S;Ohdaira K;Matsumura H .Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2008(8):919-922. |
| [50] | D.H.Wan;H.L.Chen;S.Y.Chuang .Using Self-Assembled Nanoparticles to Fabricate and Optimize Subwavelength Textured Structures in Solar Cells[J].The journal of physical chemistry, C. Nanomaterials and interfaces,2008(51):20567-20573. |
| [51] | S. L. Cheng;C. H. Chung;H. C. Lee .A Study of the Synthesis, Characterization, and Kinetics of Vertical Silicon Nanowire Arrays on (001)Si Substrates[J].Journal of the Electrochemical Society,2008(11):(D)711-714. |
| [52] | Qi D;Lu N;Xu H et al.Simple approach to wafer-scale self-cleaning antireflective silicon surface[J].Langmuir,2009,25(14):7769. |
| [53] | Peng KQ;Hu JJ;Yan YJ;Wu Y;Fang H;Xu Y;Lee ST;Zhu J .Fabrication of single-crystalline silicon nanowires by scratching a silicon surface with catalytic metal particles[J].Advanced functional materials,2006(3):387-394. |
| [54] | X. Li;P. W. Bohn .Metal-assisted chemical etching in HF/H_(2)O_(2) produces porous silicon[J].Applied physics letters,2000(16):2572-2574. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%