介绍了微型电液动力泵的优化设计和工艺改进。电液动力微泵制作工艺的改进包括：材料的选择,微电极的优化设计和封装工艺的改进。使用聚二甲基硅氧烷（PDMS）作为构建微流道的材料,采用浇注法制作了PDMS微流道,并采用阳极键合方式进行微泵的封装。使用无水乙醇为工作流体对微泵进行流动实验,在驱动电压为90 V时,电液动力微泵驱动流体的最大流速可以达到92 uL/min。
The development of electrohydrodynamic（EHD）micropump was introduced.The fabrication process of EHD micropump was presented from the material selection,optimal design of microelectrode and assembly process.PDMS was used making micro fluid channel through the casting molding process.Anodic bonding was used in micropump assembly packing.Flow experiment was carried out on ethyl alcohol.The results indicate that the EHD micropump can achieve a maximum flow rate is 92 uL/min at applied voltage of 90 V.
参考文献
| [1] | Peter Woias .Micropumps-past, progress and future prospects[J].Sensors and Actuators, B. Chemical,2005(1):28-38. |
| [2] | Suresh V. Garimella .Advanpes in mesoscale thermal management technologies for microelectronics[J].Microelectronics journal,2006(11):1165-1185. |
| [3] | 于翮,张强,乔大勇,俞坚.电液动力微泵微电极的不同制作工艺的比较[J].光学精密工程,2009(07):1635-1639. |
| [4] | Si-Hong Ahn;Yong-Kweon Kim .Fabrication and experiment of a planar micro ion drag pump[J].Sensors and Actuators, A. Physical,1998(1/3):1-5. |
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