简单介绍了溶胶-凝胶方法的特点、平面光波导的基本结构及工艺特点;简要回顾了国内外近年来无机薄膜、复合薄膜、稀土配合物在工艺、合成、性能、机理等方面的研究情况.与传统的无机平面光波导薄膜相比,有机-无机复合薄膜具有明显的优势,可以在低温下一次拉制成具有实用价值的平面光波导厚膜.稀土配合物的发展解决了稀土与复合薄膜中有机组分不相容、掺杂浓度低的问题.因此,稀土配合物是制作有源平面光波导复合薄膜的理想材料.
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