采用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了多种不同组分的(Pb1-xSrx)TiO3(PST)(x=0.45、0.50、0.55、0.60、0.65)均匀薄膜和多层膜,并研究了它们的介电性质.发现均匀薄膜在x=0.55(PST55)时有最大的介电常数,10kHz下为879,损耗为0.029.在与均匀薄膜相同的条件下分别制备了PST45/PST55,PST50/PST60,PST55/PST65 3种多层膜.发现PST50/PST60多层膜的介电常数得到了明显的增强,在频率为10kHz时相对于同厚度的PST55均匀薄膜从879增加到1008,而损耗依然保持较低(0.027).研究同时表明,PST多层膜在电容-电压可调谐性和介电击穿等性质方面也较均匀薄膜有不同程度提高.与其它两种多层膜比较后发现,在PST50/PST60多层膜中处于PST55左右组分的界面层对介电性质有比较大的影响.
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