本文采用金属有机化学气相沉积(MOCVD)法在MgO(100)衬底上成功生长了非极性的m面(1010) ZnMgO薄膜.研究了衬底温度对ZnMgO薄膜生长取向的影响.X射线衍射(XRD)分析结果表明当衬底温度为400℃时可以获得单一取向的m面ZnMgO薄膜.采用扫描电子显微镜(SEM)观察到ZnMgO薄膜表面平整,由条纹状结构组成.透射电子显微镜(TEM)分析进一步证明ZnMgO为具有m面取向的单晶薄膜.X射线光电子能谱(XPS)定量分析表明ZnMgO薄膜中Mg含量为3at.％.
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