采用溶胶-凝胶工艺在印有梳状银电极的石英玻璃表面制备了不同含量Sn2+掺杂的氧化钛薄膜,通过烧结制得一系列湿敏元件,研究了Sn2+掺杂量、烧结温度和工作频率对薄膜湿敏性能的影响.研究表明,较低的工作频率下元件的湿敏性能较好;Sn2+的加入不同程度地降低了TiO2基薄膜的阻抗值,其中TiO2-15wt%SnO2薄膜表现出最高的灵敏度;薄膜高的湿敏性能与Sn2+掺杂引起的晶粒度变化以及热处理过程中的晶型转变有关.
参考文献
| [1] | 徐松梅,高朋召,石宗利.双元素掺杂改性二氧化钛的研究进展[J].硅酸盐通报,2008(04):777-781,790. |
| [2] | 应皆荣,姜长印,万春荣.TiO2基陶瓷湿敏元件的研究和发展[J].功能材料,2000(06):565. |
| [3] | Traversa E;Gnappi G;Montenero A et al.Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors[J].Sensors and Actuators B:Chemical,1996,31:59-70. |
| [4] | Weon-Pil Tai;Jae-Hee Oh .Fabrication and humidity sensing properties of nanostructured TiO_2-SnO_2 thin films[J].Sensors and Actuators, B. Chemical,2002(1/2):154-157. |
| [5] | Weon-Pil Tai;Jae-Hee Oh .Preparation and humidity sensing behaviors of nanocrystalline SnO_2/TiO_2 bilayered films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1/2):220-224. |
| [6] | 闫龙,史志铭,金丽娜.稀土掺杂氧化钛基材料的相变及其湿度-电阻关系[J].人工晶体学报,2007(02):480-483,479. |
| [7] | Shi ZM;Yan L;Jin L;Lu XM;Zhao G .The phase transformation behaviors of Sn2+-doped Titania gels[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2007(22/23):2171-2178. |
| [8] | Klug H P;Alexander L E.X-ray diffraction procedures for polycrystalline and amorphous materials[M].New York:Wiley,1974 |
| [9] | 程麟,殷志峰,凌志达.Nasicon系陶瓷湿敏材料和湿度传感器的研究[J].硅酸盐通报,2007(01):29-32,149. |
| [10] | 王智民,韩基新,刘静波.掺镧改性钛酸钡湿敏陶瓷元件[J].无机材料学报,2002(06):1187-1193. |
| [11] | Zhang JR;Gao L .Synthesis and characterization of nanocrystalline tin oxide by sol-gel method[J].International Journal of Quantum Chemistry,2004(4/5):1425-1430. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%