采用磁控共溅射法制备了系列(Fe65CO35)x,(SiO2)1-x,纳米磁性颗粒膜,并研究了其微结构和微波特性.结果表明,样品在x=0.5～0.7的宽成分范围内表现出良好的软磁特性,Hc最大不超过4Oe,电阻率高达103μΩ·cm.样品同时具有良好的高频磁特性,磁谱的共振频率高迭2.4GHz,可用于抗电磁干扰和微波吸收材料.HRTEM分析表明,Fe65Co35纳米颗粒均匀地镶嵌在绝缘的SiO2介质中.由于Fe65Co35合金具有较长的交换长度,因此有利于加强磁性颗粒之间的交换耦合作用,使样品获得优良的软磁特性.更高体积分数的样品中颗粒之间的相互作用减弱,可能是因为未被平均掉的磁晶各向异性.
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