A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

稀有金属材料与工程, 2006, 35(z2): 519-521.

Fuxue Zhang ^1, , Xu Mao ^2, , Yu Liu ^3, , Nan Zhang ^4, , Wei Zhang ^5,

1.Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

2.Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

3.Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

4.Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

5.Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

基金项目: the BeijingNatural Science Foundation of China(4032010) the National Natural Science Foundation of China(60272001)

A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

Keywords： rotating carrier

This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

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A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

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