采用激光和氮等离子体混合方法在大气气氛下对钛样品表面进行处理,获得了钛氮化合物表层.利用X射线衍射仪(XRD)对氮化处理后的样品测试,得到了样品的相结构.分别使用该方法与普通激光氮化方法,在相同条件下对样品表面进行氮化处理,结果表明通过混合方法提高了氮化物含量,并有效地抑制了氧化发生.讨论了氮等离子体流量对混合法氮化效果的影响.随着氮等离子体流量的增加,氮化物含量增加;但是当氮等离子体流量＞0.8m3/h后,氮化所需活化氮达到饱和,氮化物含量不再增加.
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