软刻蚀技术是基于传统光刻蚀技术提出的一系列技术,包括微模塑、转移微模塑和毛细微模塑等,其共同特点是利用弹性模作为微结构转移元件,复制其他方法制备的原始模板的微结构,再用此弹性模进行微结构的成形.因其成本低廉、操作过程简单,为陶瓷微器件的制备提供了一种先进的净成形加工技术.其工艺步骤主要包括:弹性模的制备、浆料或陶瓷预聚体的制备、注模、干燥(交联固化)、脱模和烧结.本文按照制备工艺综述了软刻蚀技术成形陶瓷微器件的研究进展,着重讨论了影响微成形的关键因素,并对将来的研究方向进行了展望.
参考文献
[1] | Li-Anne Liew;Wenge Zhang;Linan An .Ceramic MEMS[J].American Ceramic Society bulletin,2001(5):25-30. |
[2] | Hiroshi Fudouzi;Yoshio Sakka .Effect of drying conditions on patterned ceramic films processed by soft micromolding[J].Journal of the Ceramic Society of Japan,2010,118(03):202-205. |
[3] | Knitter R;Gohring D;Risthaus P;HauBelt J .Microfabrication of ceramic microreactors[J].Microsystem Technologies,2001,7:85-90. |
[4] | S. Bystrova;R. Luttge .Micromolding for ceramic microneedle arrays[J].Microelectronic engineering,2011(8):1681-1684. |
[5] | Junhu Meng;Ngiap Hiang Loh;Gang Fu .Micro powder injection moulding of alumina micro-channel part[J].Journal of the European Ceramic Society,2011(6):1049-1056. |
[6] | Younan Xia;George M. Whitesides .Soft lithography[J].Angewandte Chemie International Edition,1998(5):551-576. |
[7] | Daniel B.Wolfe;J.Christopher Love;George M.Whitesides.Dekker Encyclopedia of Nanoscience and Nanotechnology[M].New York:Taylor & Francis,2004:2657-2666. |
[8] | Mohamed Imbaby;Kyle Jiang;Isaac Chang .Fabrication of 316-L stainless steel micro parts by softlithography and powder metallurgy[J].Materials Letters,2008(26):4213-4216. |
[9] | Dong Qin;Younan Xia;George M Whitesides .Soft lithography for micro- and nanoscale patterning[J].Nature protocols erecipes for researchers,2010(3):491-502. |
[10] | Stephen R.Quake;Axel Scherer .From micro-to nanofabrication with soft materials[J].Science,2000,290:1536-1540. |
[11] | Byron D. Gates .Nanofabrication with molds & stamps[J].Materials Today,2005(2):44-49. |
[12] | 金邦坤,吴晓松,陈大柱,何平笙.有机硅橡胶/蒙脱土纳米复合弹性印章的制备[J].高等学校化学学报,2003(06):1142-1144. |
[13] | Mary E. Wilson;Nithyanand Kota;YongTae Kim .Fabrication of circular microfluidic channels by combining mechanical micromilling and soft lithography[J].Lab on a chip,2011(8):1550-1555. |
[14] | N. Lucas;S. Demming;A. Jordan;P. Sichler;S. Buttgenbach .An improved method for double-sided moulding of PDMS[J].Journal of Micromechanics and Microengineering,2008(7):075037-1-5-0. |
[15] | Hongbin Yu;Guangya Zhou;Fook Siong Chau;Sujeet K. Sinha .Soft lithography replication based on PDMS partial curing[J].Microsystem technologies,2011(3):443-449. |
[16] | Sigmund W.M.;, .Novel powder-processing methods for advanced ceramics[J].Journal of the American Ceramic Society,2000(7):1557-1574. |
[17] | Cesarano Ⅲ J;Aksay I.A;Bleier A .Stability of aqueous α-Al2O3 suspensions with poly(methacrylic acid) polyelectrolyte[J].Journal of the American Ceramic Society,1988,71(04):250-255. |
[18] | Huisman W;Graule T;Gauckler L .Alumina of high reliability by centrifugal casting[J].J J Euro Ceram Soc,1995,15:811-821. |
[19] | Dou Zhang;Bo Su;Tim W.Button .Preparation of concentrated aqueous alumina suspensions for soft-molding microfabrication[J].Journal of the European Ceramic Society,2004,24:231-237. |
[20] | Dou Zhang;Bo Su;Tim W. Button .Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding[J].Advanced Engineering Materials,2003(12):924-927. |
[21] | Johan E. ten Elshof;Sajid U. Khan;Ole F. Gobel .Micrometer and nanometer-scale parallel patterning of ceramic and organic-inorganic hybrid materials[J].Journal of the European Ceramic Society,2010(7):1555-1577. |
[22] | Yang H.;Brittain ST.;Whitesides GM.;Deschatelets P. .Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography[J].Advanced Materials,2001(1):54-58. |
[23] | Xiang Liu;Ya-Li Li;Feng Hou .Fabrication of SiOC Ceramic Microparts and Patterned Structures from Polysiloxanes via Liquid Cast and Pyrolysis[J].Journal of the American Ceramic Society,2009(1):49-53. |
[24] | Li-Anne Liew;Wenge Zhang;Victor M. Bright;Linan An;Martin L. Dunn;Rishi Raj .Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique[J].Sensors and Actuators, A. Physical,2001(1/2):64-70. |
[25] | Yeon-Suk Jong;Michael Jank;Verena Maier;Karsten Durst;Nahum Travitzky;Cordt Zollfrank .SiC ceramic micropatterns from polycarbosilanes[J].Journal of the European Ceramic Society,2010(13):2773-2779. |
[26] | Zhigang Zhu;Hany Hassanin;Kyle Jiang .A soft moulding process for manufacture of net-shape ceramic microcomponents[J].The International Journal of Advanced Manufacturing Technology,2010(1/4):147-152. |
[27] | Marzellus Grosse Holthaus;Miron Kropp;Laura Treccani;Walter Lang;Kurosch Rezwan .Versatile Crack-Free Ceramic Micropatterns Made by a Modified Molding Technique[J].Journal of the American Ceramic Society,2010(9):2574-2578. |
[28] | Kahp Y.Suh;Yun S.Kim;Hong H.Lee .Capillary force lithography[J].Advanced Materials,2001,13(18):1386-1389. |
[29] | Xiao-Mei Zhao;Younan Xia;George M. Whitesides .Fabrication of Three-Dimensional Micro-Structures: Microtransfer Molding[J].Advanced Materials,1996(10):837-840. |
[30] | Sung-Jin Ahn;Ji-Hyun Min;Joosun Kim .Process Mechanism for Vacuum-Assisted Microfluidic Lithography with Ceramic Colloidal Suspensions[J].Journal of the American Ceramic Society,2008(7):2143-2149. |
[31] | Dou Zhang;Bo Su;Tim W. Button .Improvements in the structural integrity of green ceramic microcomponents by a modified soft moulding process[J].Journal of the European Ceramic Society,2007(2/3):645-650. |
[32] | Raymond C.Chiu;M.J,Cima .Drying of granular ceramic films:Ⅱ,drying stress and saturation uniformity[J].Journal of the American Ceramic Society,1993,76(09):2769-2777. |
[33] | Karnail B. Singh;Mahesh S. Tiramkudulu .Cracking in Drying Colloidal Films[J].Physical review letters,2007(21):218302.1-218302.4. |
[34] | Oliver Guillon;Christine Jamin;Rajendra K.Bordia .Effect of drying conditions on patterned ceramic films processed by soft micromolding[J].Journal of the Ceramic Society of Japan,2010,118(04):321-325. |
[35] | Raymond C.Chiu;T.J.Garino;M.J.Cima .Drying of granular ceramic films:I,effect of processing variables on cracking behavior[J].Journal of the American Ceramic Society,1993,76(11):2257-2264. |
[36] | Smith, M.I.;Sharp, J.S. .Effects of substrate constraint on crack pattern formation in thin films of colloidal polystyrene particles[J].Langmuir: The ACS Journal of Surfaces and Colloids,2011(13):8009-8017. |
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