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Thin films of SrCuO(2) with tetragonal structure have been epitaxially grown on SrTiO(3) (001) substrates by high-oxygen pressure sputtering technique. The interface structure between SrCuO(2) and SrTiO(3) and configuration of defects in SrCuO(2) thin films have been characterized by means of high-resolution transmission electron microscopy. Two types of film-substrate interface structure coexist and are determined as bulk-SrO-TiO(2)-Sr(O) -CuO(2)-Sr-bulk and bulk-SrO-TiO(2)-SrO-Sr(O) -CuO(2)-Sr-bulk. The planar faults with double SrO atomic layers in (100) planes in SrCuO(2) thin films are observed, which mainly arise from the coalescence of these two types of film-substrate interface structure. Meanwhile, planar faults in (110) planes are observed in thin films and structural models are proposed. (C) 2010 Elsevier B.V. All rights reserved.