金刚石膜中氮杂质状态的研究

功能材料, 2004, 35(z1): 3314-3319.

金刚石膜中氮杂质状态的研究

金曾孙 ^1, , 吕宪义 ^2, , 杨广亮 ^3, , 吴汉华 ^4, , 李哲奎 ^5, , 刘建设 ^6,

1.吉林大学,超硬材料国家重点实验室,吉林,长春,130012

2.吉林大学,超硬材料国家重点实验室,吉林,长春,130012

3.吉林大学,超硬材料国家重点实验室,吉林,长春,130012

4.吉林大学,超硬材料国家重点实验室,吉林,长春,130012

5.延边大学,物理系,吉林,延吉,133000

6.河南黄河旋风有限责任公司,河南,长葛,461500

基金项目: 国家高技术研究发展计划(863计划)

关键词： EA-CVD方法 , 金刚石膜 , 氮杂质

The study for nitrogen impurity states in diamond films grown by EA-CVD method

用EA-CVD(Electron assisted Chemical Vapor Deposition)方法制备出金刚石膜,并且用拉曼光谱、荧光谱、红外吸收谱和顺磁共振谱研究了金刚石膜中的氮杂质.实验结果表明,用EA-CVD方法制备的金刚石膜中氮杂质主要是以Ns0、Ns+、[N-V]0和[N-V]-1的形式存在,没有检测到在天然金刚石和高温高压金刚石中常见的A和B中心形式存在的氮杂质.沉积实验中随着氢气流量的增加,也就是金刚石膜沉积环境中氮浓度的减少,金刚石膜中氮杂质含量减少.

参考文献

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金刚石膜中氮杂质状态的研究

The study for nitrogen impurity states in diamond films grown by EA-CVD method

参考文献