原位观察交变电流作用下纳米晶铜互连线的表面损伤形貌演化过程,重点研究了交变热-机械载荷作用下硅基铜互连线的电致热疲劳性能.结果表明,铜互连线电致热疲劳寿命随着电流密度的增加而减小;载流铜互连线表现出新的变形方式,具有独特的电致热疲劳行为特征.在低电流密度(j<10 MA/cm2)条件下,在电致热疲劳中应力控制的晶粒挤出损伤机制起主导作用;而在高电流密度(j>10 MA/cm2)条件下,交变电流产生的焦耳热效应起主导作用.
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