简述了国内外多晶硅生产工艺的发展和现状,介绍和比较了各种多晶硅的制备方法在产能、能耗及环境友好特性等方面的特点.介绍了多晶硅CVD的原理、反应机理及其研究方法,综述了流态化多晶硅CVD的基本原理、研究现状以及存在的问题.分析表明:利用硅烷流态化技术最有希望降低多晶硅生产成本;数值模拟作为描述CVD过程的重要手段需要进一步完善其模型,特别是对流态化CVD过程,需要建立各种物理化学现象的耦合作用模型.
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