CaO-B2O3-SiO2微晶玻璃基板具有介电常数低、能与金属电极低温共烧等特性.设计了3种玻璃配方,重点研究了其烧结性能和晶相组成.通过差热分析、X射线衍射晶相分析、SEM形貌分析、烧结收缩实验以及介电性能测定等,研究了玻璃组成、粉体颗粒度和烧结制度等对材料晶相组成和性能的影响.结果表明,主晶相为硅灰石,粉体颗粒度D50在2靘左右,经850℃、10min烧结,可以获得致密度高、介电常数和介电损耗低的LTCC材料.
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