PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM

金属学报(英文版), 2003, 16(4): 309-312.

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1.College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

2.Guangzhou Institute of Energy Conversion, The Chinese Academy of Sciences, Guangzhou 510070, China

3.College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

4.College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

基金项目: 国家高技术研究发展计划(863计划)(2001AA513060) 中国科学院"百人计划"(99-019-422288)

PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM

Keywords： poly-crystalline silicon thin film

Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells.In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6. 05% without anti-reflection coating.

参考文献

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[6]	Y Y Wang;T.L Kamins;B.Y. Zhao.Poly-Crystalline Silicon Thin Film and Its Applications in Integrate Circuit 2nd edition[M].北京:科学出版社,2001:62.

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PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM

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