通过傅立叶红外吸收光谱(FTIR)、1H和13C核磁共振波谱(NMR)对制备PZT铁电薄膜的Sol-Gel化学反应过程进行了分析.结果表明,采用硝酸氧锆(ZrO(NO3)2·2H2O)为锆源并使用单一溶剂制备PZT铁电薄膜,溶胶-凝胶化过程中化学反应相对简单,多组分系统稳定性较高,工艺条件易于控制,所制备的Pb(Zr0.53Ti0.47)O3铁电薄膜致密性好,晶粒尺寸小且分布均匀.
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