基于调制掺杂的ZnMgO/ZnO异质结构模型,通过自洽求解一维泊松-薛定谔方程,研究了掺杂浓度、空间层厚度对ZnMgO/ZnO异质界面处二维电子气(2DEG)的分布、面密度等性质的影响.结果表明:ZnO沟道中的二维电子气主要来源于极化效应诱生的电子和掺杂层转移的电子,通过改变掺杂浓度和空间层厚度可以有效地调控异质结中的二维电子气.采取的研究方法和所得结果可以为ZnO基异质结构及相关器件的构筑提供基础.
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