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探讨不同氮分压下磁控溅射氮化锆(ZrN)涂层对纯钛与低熔瓷粉(Vita钛瓷粉系统)结合强度的影响.60个纯钛基片随机分为1个对照组和3个实验组.实验组分别在不同氮分压下(Ta组1.0×10-2Pa,Tb组5.0×10-2Pa和Tc组10.0×10-2Pa)溅射沉积ZrN涂层.纯钛试样经表面处理后在烤瓷炉中进行烧结.用XRD检测到ZrN立方新相.万能试验机测试钛瓷试样三点抗弯强度,对照组为(26.67±0.88)Mpa,实验组分别为:Ta(49.41±0.55)Mpa,Tb(54.55±0.69)Mpa和Tc(46.24±0.53)Mpa,四组间差别均有统计学意义(P<0.05).SEM观察表明,实验组钛/瓷结合良好,钛基底残留的瓷断面数量较多,面积较大.不同氮分压下溅射沉积的ZrN涂层对钛/瓷结合的增强程度有所不同,5.0×10-2Pa下钛/瓷结合增强最为明显.

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