将一种新型组合光亮剂用于碱性镀铜工艺中,利用极化曲线、赫尔槽样板法、扫描电子显微镜(SEM)及X射线衍射(XRD)等分析了组合光亮剂中各添加剂对镀液极化能力的影响,研究了镀液的分散、覆盖能力,镀层的结合能力、表面形貌、组成及晶体结构.结果表明:组合光亮剂中4种添加剂均能提高镀液的极化能力,在铜沉积过程中具有不同的作用;电流密度为1～10 A/dm~2时,铜镀层晶粒均匀细致;镀层厚度较薄时满足(111)和(220)晶面择优取向协同生长的方式,而中等厚度的镀层趋向于(111)晶面择优取向生长.
A novel combinatory brightening agent was used for Cu electroplating in an alkaline hath. The effect of composition of the brightening agent on the polarization ability of the plating solution was examined by making use of polarization curve measurement, Hell cell test, and scanning electron microscopy and X-ray diffraction analysis. At the same time, the bonding strength, morphology,onmposition, and crystal structure of the electroplated Cu coating were analyzed. It was found that the four kinds of additives introduced into the combinatory brightening agent were all able to increase the polarization ability of the plating solution and functioned in different ways during Cu electroplating. The Cu coating obtained at a current density of 1～10 A/dm~2 was composed of fine Cu grains. Moreover, when the Cu coating was relatively thinner, it tended to grow with preferential orientation along (111) and (220) planes while the coating with a moderate thickneas tended to grow with preferential orientation along (111)plane.
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