分别采用非水解和水解溶胶-凝胶法制备TiO2薄膜,利用FTIR、TG-DSC和XRD等手段研究了薄膜形成过程中的溶胶-凝胶转变过程和相变化过程,并探讨了非水解和水解溶胶-凝胶法的微观反应机制.研究表明:非水解溶胶-凝胶法与水解溶胶-凝胶法制备TiO2薄膜的微观反应机制不同,水解溶胶-凝胶法是钛酸丁酯的Ti-O键合(TiOR)断裂形成水解产物Ti-OH,再经失水缩聚或是失醇缩聚反应形成Ti-O-Ti键合.而非水解溶胶-凝胶法是在不生成Ti-OH的情况下,利用Ti-Cl与Ti-OR通过亲核反应直接缩聚反应产生Ti-O-Ti键合.非水解溶胶-凝胶法制备的TiO2薄膜开始出现金红石相的温度为750℃,明显高于水解溶胶-凝胶法制备的TiO2薄膜.
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