Ultrasonic Assisted SILAR method ( UA-SILAR ) was developed and highly oriented ZnO films were deposited on the glass substrate by this novel technique. The crystallinity and microstructure of as-deposited ZnO films were analyzed by means of XRD and SEM. Moreover, the underling deposition mechanism of ZnO films was discussed. Results show that obtained ZnO films exhibit an excellent crystallinity with the preferential orientation of (002) plane. The crystalline grain of films is about 40nm in size, which is supported by both the Sherrer equation and the SEM result. However, the ZnO film is composed of numerous clustered particulates in the size of 200 to 300 nm, and each particulate is the compact aggregation of smaller ZnO crystalline grains. It is speculated that the excellent crystallinity of ZnO films may chiefly originate from the cavatition effect of the ultrasonic rinsing process.
参考文献
| [1] | Znaidi L.;Illia GJAAS.;Benyahia S.;Sanchez C.;Kanaev AV. .Oriented ZnO thin films synthesis by sol-gel process for laser application[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):257-262. |
| [2] | T Saeed;P O Brien .Deposition and Characterization of ZnO Thin Films Grown by Chemical Bath Deposition[J].Thin Solid Films,1995,271:35-38. |
| [3] | T P Niesen;M R De Guire .Deposition of Ceramic Thin Films at Low Temperatures From Aqueous Solutions[J].Solid State Ionics,2002,151:61-68. |
| [4] | Y F Nicolau .Solution Deposition of Thin Solid Compound Films by a Successive Ionic-Layer Adsorption and Reaction Process[J].Applied Surface Science,1985,22/23:1061-1074. |
| [5] | M Ristov Gj .SinadinovskiI Grozdanov. Chemical Deposition of ZnO Films[J].Thin Solid Films,1985,123:63-67. |
| [6] | A E Jinenez-Gonzailez;P K Nair .Photosensitive ZnO Thin Films Prepared by the Chemical Deposition Method SILAR[J].Semicon Sci Technol,1995,10:277-228. |
| [7] | Thierry Pauporte;Daniel Lincot .Electrodeposition of semiconductors for optoelectronic devices: results on zinc oxide[J].Electrochimica Acta,2000(20):3345-3353. |
| [8] | X D Gao;X M Li;W D Yu.Deposition of Polycrystalline ZnO Thin Films by Successive Ionic Layer Adsorption and Reaction Process (SILAR)[J].Journal of Inorganic Materials |
| [9] | Ryu YR.;Wrobel JM.;Jeong HM.;Miceli PF.;White HW.;Zhu S. .Comparative study of textured and epitaxial ZnO films[J].Journal of Crystal Growth,2000(1/4):326-329. |
| [10] | Fujihara S.;Kimura T.;Sasaki C. .Crystallization behavior and origin of c-axis orientation in sol-gel-derived ZnO : Li thin films on glass substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2001(3/4):341-350. |
| [11] | K S Suslick .Sonochemistry[J].Science,1990,247:1439-1445. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%