LaAlO3/BaTiO3超晶格薄膜界面结构分析

材料导报, 2005, 19(2): 103-105.

LaAlO3/BaTiO3超晶格薄膜界面结构分析

郝兰众 ^1, , 李燕 ^2, , 邓宏 ^3, , 刘云杰 ^4, , 姬洪 ^5,

1.电子科技大学微电子与固体电子学院,成都,610054

2.电子科技大学微电子与固体电子学院,成都,610054

3.电子科技大学微电子与固体电子学院,成都,610054

4.电子科技大学微电子与固体电子学院,成都,610054

5.电子科技大学微电子与固体电子学院,成都,610054

基金项目: 国家重点基础研究发展计划(973计划)(51310z)

关键词：超晶格薄膜 , LaAlO3/BaTiO3 , 高能电子衍射 , 小角X射线衍射 , 激光分子束外延技术

Analysis of Microstructures of LaAlO3/BaTiO3 Superlattice

通过研究发现,利用激光分子束外延技术生长的LaAlO3/BaTiO3超晶格薄膜具有良好的电学性能,其剩余极化可达到25μc/cm2.性能决定于结构,因此本文分析研究了LaAlO3/BaTiO3超晶格薄膜的界面结构.首先通过高能电子衍射技术在薄膜生长过程中对各层的生长及界面状况进行观测,再通过小角X射线衍射曲线及其计算机拟合曲线进一步确定超晶格薄膜的界面及结构参数,如界面的粗糙度、单层厚度等.通过研究发现,由于晶格之间的差异,LaAlO3/BaTiO3超晶格薄膜中LaAlO3和BaTiO3层的生长过程及微结构存在着一定的差异.

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材料期刊网

LaAlO3/BaTiO3超晶格薄膜界面结构分析

Analysis of Microstructures of LaAlO3/BaTiO3 Superlattice

参考文献