利用能量为1.7MeV、注量分别为1013～1015/cm2的电子辐照VO2薄膜,采用XPS、XRD等测试手段对电子辐照前后的样品进行分析,并采用光透射性能和电学性能测试研究了电子辐照对样品相变过程中光电性能的影响.结果表明电子辐照在VO2薄膜中出现变价效应,产生新的X射线衍射峰,带来薄膜化学成分的变化.电子辐照在样品中产生的这些变化对VO2的热致相变特性有明显影响.
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