采用溶胶凝胶法在云母衬底上制备出掺杂Mo的VO2薄膜,并采用XRD、AFM、XPS、FTIR等检测手段,对掺杂薄膜的物相组成、微观形貌、相变温度进行分析.结果表明:在云母片表面制备出的掺杂的VO2薄膜呈(011)晶面取向生长,并且每增加1%的Mo掺杂量,其相变温度下降7.82℃,掺杂后降低了样品的滞回温宽,而且薄膜相变前后红外透过率的变化量仍保持较高.
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