The feasibility and the limitation of the 'high-energy electron thinning' method for the production of surface-science-grade samples in situ in the electron microscope are studied. Exploiting the electron beam supplied by high-voltage electron gun in electron microscope, this method can be readily realized. An obvious advantage of this method is that we can monitor the sample surface concurrently. However, this sample preparation method depends strongly on the sample material and the local environment within the electron microscope. Factors relating to the electron thinning speed are briefly discussed.
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