PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

金属学报(英文版), 2003, 16(4): 283-288.

^1, , ^2, , ^3, , ^4,

1.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

2.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

3.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

4.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

基金项目: 广东省科技攻关项目(2KM00407G) 广东省纳米材料科技计划(2001A1060404)

PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

Keywords： vacuum evaporation

Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evaporation parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10-4 pa, respectively.

参考文献

[1]	M B Tian;D.L.Liu.Handbook of Films Science & Technology[M].First Volume, Machinery Industry Publisher, Beijing,1991:1.
[2]	B C Yang;W.X. Wang.Films Physics & Technology[M].成都:电子科技大学出版社,1994:17.
[3]	J George.Preparation of Thin Films[M].Marcel Dekker Inc., New York,1992:1.
[4]	X X Qu.Thin Films Physics[M].上海:上海科学技术出版社,1986:25.
[5]	X X Qu;B.J. Guo.Thin Films Physics[M].北京:电子工业出版社,1994:56.

上一张下一张

计量

下载量()
访问量()

作者相关

在本站搜索
在百度学术搜索
在万方数据库搜索
在CNKI搜索

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

PREPARATION AND PROPERTIES OF Ni-Cr AND Fe-Cr-Al FILMS BY VACUUM EVAPORATION

参考文献