本文采用脉冲激光沉积方法,在Si衬底上制备了ZnO薄膜.在制备好的薄膜上,用电子束蒸发沉积不同厚度的Al膜并进行快速热退火处理,系统研究了金属厚度、形貌及界面态对发光增强的影响.实验结果显示,在ZnO表面沉积一层金属薄膜时,ZnO的发光强度会降低,且随着金属厚度增加,发光强度越来越弱.当对镀有金属的样品进行退火处理后,ZnO的发光得到增强,且增强倍数在A1厚度为6nm时达到最大.这归因于退火形成的金属颗粒对金属有序表面等离激元的有效散射及退火造成的ZnO-Al界面态的变化.
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