利用Ag的高温抗氧化能力,采用磁控溅射沉积Al/Ag/Al导电复合薄膜,并在480℃下进行热处理。扫描电子显微镜（SEM）和能谱分析（EDS）研究表明磁控溅射的Al/Ag/Al导电复合薄膜表面平整,热处理后表面Al膜生成致密的氧化层。溅射沉积和热处理过程中Ag和Al原子的相互扩散,最后形成富Ag的Ag-Al合金和Ag3Al化合物。Al/Ag/Al导电复合薄膜比Ag/Al复合薄膜的电阻率增大了一个数量级,导电复合薄膜热处理后导电性能更优,电阻率约为19.4×10-6Ω.cm。
The Al/Ag/Al electric composite films were prepared by magnetron sputtering and treated at 480℃ due to the ability of oxidation resistance of Ag.The morphology and composite of Al/Ag/Al composite films were characterized by scanning electron microscope（SEM） and X-ray spectroscope（EDS）,respectively.The results indicated the surface of composite films was oxidized in the process of heat treatment.The Ag-Al alloy with rich Ag and Ag3Al compound were produced for the interdiffusion between Ag and Al atoms during the magnetron sputtering and heat treating.The resistivity of Al/Ag/Al composite films was largened as a result of an Al layer at the surface,and which was about 19.4×10-6Ω·cm after heat treatment.
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