综述了低介电常数(low-k)材料研究的基本情况,以及可用于微电子领域的低介电常数聚合物材料,包括材料的化学结构和基本物理性质.并着重介绍了带有纳米孔的超低介电常数材料的研究进展.同时,对低介电常数材料的制备工艺也进行了简要的总结.
参考文献
| [1] | Bohr M.[J].IEEE IEDM Technical Digest,1995:241. |
| [2] | Semiconductor Industry Association .International Technology Roadmap for Semiconductors (ITRS[OL].http://www.itrs.Net/ntrs/publntrs.Nsf,1998. |
| [3] | Miller R D .[J].科学（上海),1999,15(286):421. |
| [4] | Maier G.[J].Progress in Polymer Science,2001(26):3-65. |
| [5] | Fayolle M et al.[J].Microelectronic Engineering,2002,60:119-124. |
| [6] | Ma YJ.;Guo J.;Sathe C.;Agui A.;Nordgren J.;Yang HN. .Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films[J].Applied physics letters,1998(25):3353-3355. |
| [7] | Towery D;Fury MA .[J].Journal of Electronic Materials,1998,27:1088. |
| [8] | Sezi R;Weber A;keitmann M .[P].Eur Pat EP 918050,1999. |
| [9] | Sharang R;Sing P R .[J].Review of Scientific Instruments,1997,68(03):1564-1570. |
| [10] | Rosenmeyer C T;Wu H .[J].Proc Mater Res Soc,1996,427:463. |
| [11] | Case C B et al.Mater. Res[J].Social Symposium Proc,1997,443:177. |
| [12] | Batchalder T;Cai W et al.[J].Solid State Technology,1999,3:29-34. |
| [13] | Anda Y;Kawashima K;Nishitsuji M.[J].IEICE Transactions on Electronics,2001(10):1323-1327. |
| [14] | Chang T C.[J].THIN SOLID FILMS,2001:398-399. |
| [15] | Tsai M H;Whang W T .[J].Polymer,2002,42:4197-4207. |
| [16] | Aono M;Nitta S .[J].Diamond and Related Materials,2002,11:1219-1222. |
| [17] | Arnal V et al.[J].Microelectronic Engineering,2002,60:143-148. |
| [18] | Shieh B;Saraswat K;Deal M.[J].Solid State Technology,1999:51-58. |
| [19] | Hedrick J L et al.[J].Advances in Polymer Science,1998,141:1. |
| [20] | Niu J Q;Martin S J;Godschalx J P.ACS 224th National Meeting (Division of Polymeric Materials Boston MA[C].,2002 |
| [21] | Prakash S S;Brinker C J;Hurd A J .[J].Journal of NON-CRYSTALLINE SOLIDS,1995,190:264. |
| [22] | LU Y.;GANGULI R.;DREWIEN C. A.;ANDERSON M. T.;BRINKER C. J.;GONG W.;GUO Y.;SOYEZ H.;DUNN B.;HUANG M. H.;ZINK J. I. .CONTINUOUS FORMATION OF SUPPORTED CUBIC AND HEXAGONAL MESOPOROUS FILMS BY SOL GEL DIP-COATING[J].Nature,1997(6649):364-368. |
| [23] | Liu P T;Chang T C;Hsu K C.[J].THIN SOLID FILMS,2002:414. |
| [24] | Yang CM.;Pan FM.;Tsai TG.;Chao KJ.;Cho AT. .Spin-on mesoporous silica films with ultralow dielectric constants, ordered pore structures, and hydrophobic surfaces[J].Advanced Materials,2001(14):1099-0. |
| [25] | Templin M;Franck A;Duchesne A et al.[J].Science,1997,278:1795. |
| [26] | Zhao D Y;Huo Q S;Feng J et al.[J].Science,1998,279:548. |
| [27] | Chan V Z H;Hoffman J;Lee V Y .[J].Science,1999,286:1716. |
| [28] | David M;Nahreim K;Elbert H et al.[J].Polymeric Preprints(American Chemical Society Division of Polymer Chemistry),2000,41(01):517. |
| [29] | Shu Y;Peter A M;Pai C S et al.[J].Chemistry of Materials,2002,14:369. |
| [30] | Shu Y;Mirau P;Reichmanis E.ACS 224th National Meeting (Division of Polymeric Materials Boston MA[C].,2002 |
| [31] | Grill A .[J].Journal of Applied Physics,2003,93(03):1785. |
| [32] | Huang QR.;Volksen W.;Huang E.;Toney M.;Frank CW.;Miller RD. .Structure and interaction of organic/inorganic hybrid nanocomposites for microelectronic applications. 1. MSSQ/P(MMA-co-DMAEMA) nanocomposites[J].Chemistry of Materials,2002(9):3676-3685. |
| [33] | Miller R D;Connor E;Hawker C.ACS 225th National Meeting (Division of Polymeric Materials New Orleans LA[C].,2003 |
| [34] | ChengYL;etal.[J].THIN SOLID FILMS,2001:398-399;533-538. |
| [35] | Hyun SH.;Kim GS.;Park HH.;Kim TY. .Synthesis of low-k porous silica films via freeze drying[J].Journal of Materials Science Letters,2000(20):1863-1866. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%