提出了一种新的方法可以使锆钛酸铅压电陶瓷PZT7具有形状记忆效应.用自制的sawyer-Tower电路测试得到PZT7方形样品发生极化反转对应的电场强度大约为130kV/cm.当施加对称的饱和极化电压370V时,PZT7/Si(109/146μm)悬臂梁端部的变形一电场曲线呈现典型的"蝴蝶"形状.在外电场为0时,悬臂梁端部的变形为0.如果施加不对称的极化电压,悬臂梁端部的变形--电场曲线发生明显的变化.不同的反向极化电压使悬臂梁端部产生不同的变形,而且,电压和变形是一一对应的.因此,在外电场为零时,PZT7/Si悬臂梁可以具有多个不同的稳定位置,表现出明显的形状记忆效应.实验表明,对于长度为15.5mm的PZT7/Si悬臂梁而言,当施加的反向极化电压从120V回到0时,悬臂梁端部产生的变形最大,为68.5μm.
The fundamental study about shape memory effect of lead zirconate titanate piezoelectric ceramics (PZT7) was carried out and a new method to make PZT7 material have shape memory effect was presented in this paper. The fabricated piezoelectric actuators are PZT7/Si (100/150μm) cantilevers with width of 5. 5mm and different lengths. The P-E hysteresis loop of PZT7 measured using Sawyer-Tower circuit shows that the co-ercive electric field of PZT7 is about 130kV/cm. When the voltage applied on the piezoelectric cantilever is satu-rated and symmetrical, the curve of piezoelectric strain versus electric field (D-E) is classical butterfly hysteresis one. However, the shape of D-E hysteresis loop has big change if the applied voltage is unsymmetrical. The pi-ezoelectric cantilever may have multistable strain conditions after the applied unsaturated voltage return 0V fromdifferent voltages. Different unsaturated reverse voltages can make PZT7/Si cantilever being on different stable strain conditions. Therefore, unsaturated reverse voltages result in shape memory effect of PZT7. Experiments show that the PZT7/Si cantilever with length of 15.5ram and width of 5.5mm has biggest residual displacement and the tip's displacement is 68.5μm after the applied reverse voltage is changed from 120V to 0V.
参考文献
| [1] | Lee H;Park J;Park Y .[J].Sensors and Actuators A Pysical,2007,136(01):282-290. |
| [2] | Rajgopal S;Knobloch A;Kennerly S.[A].USA.IEEE,2007:743-746. |
| [3] | Kobayashi T;Tsaur J;Maeda R .[J].Japanese Journal of Applied Physics,2005,44(9B):7078-7082. |
| [4] | Kanno I;Tazawa Y;Suzuki T et al.[J].Microsystem Technologies,2007,13:825-829. |
| [5] | Morita T;Kadota Y;Hosaka H .[J].Applied Physics Letters,2007,90(082909):1-3. |
| [6] | Morita T;Kadota Y;Hosaka H.[A].USA,IEEE Press,2007:721-724. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%