利用热力学中经典的ΔG<'T><0判定法,探讨了在真李高温条件下AIN的热力学稳定性.热力学计算结果表明:在标准状态下AIN的分解温度为2708 K;真空度为10<,-1>Pa、10<,-2>Pa、10<,-3>Pa时,AIN的热分解温度分别为1556 K,1454 K和1365 K;AIN的稳定性随着真空度的上升而下降.该结果为住真空高温环境下使用AIN材料提供了一定的参考.
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