简要介绍了TiSiN纳米复合涂层的晶体结构,主要从涂层的性能、制备方法、硅含量以及其它元素掺杂的影响等方面综述了TiSiN纳米复合涂层的研究进展,最后对其存在的主要问题和今后的发展方向进行了总结和展望.
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